Fabrication and characterization of micro- and nanostructures in high refractive index glasses
Grant agency: GACR
Identification number of grant: P102/33-1613876
Head of the project: RNDr. Roman Antoš, PhD.
Grant annotation
Chalcogenide glasses are due to their appropriate physical and chemical properties (such as wide transmission window in IR, high values of refractive index, photosensitivity, good solubility in alkaline solutions and good resistance to acidic solutions, and others) suitable materials for fabrication of optical micro/nano elements (such as diffractive optical elements, microlens arrays, Fresnel’s lenses, photonic crystals etc.). The aim of submitted project is the study of surface structuring of the chalcogenide thin layers and multilayers prepared by vacuum evaporation and spin-coating by various methods (photolithography, electron beam lithography, direct laser writing, hot embossing). Proposed project includes study of chalcogenide glass solution (used for deposition by e.g. spin-coating) doping possibilities aiming improvement of physical and chemical properties (such as refractive index, chemical resistance, photosensitivity, etc.) Structured thin layers will be investigated using spectral ellipsometry/scatterometry method that will be further evolved as part of proposed project.
